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Non-Contact 2D Step/Thickness (Roughness) Measurer
Release time:
2023-05-24
THINKFOCUS has been consistently dedicated to the research and development of high-precision spectral confocal measurement technology. The CLS-3000 two-dimensional profiler, equipped with a high-precision piezoelectric scanning mechanism, pushes the precision of spectral confocal technology to its absolute limit, achieving ultra-high measurement accuracy with a repeatability of 10 nm and an absolute accuracy of 20 nm.
Outstanding features
◆ Lower cost—1/2 to 1/3 the price of traditional contact profilometers.
◆ Smaller size—just 1/4 the volume of conventional contact profilometers, making system integration easier.
◆ Smaller measurement spot—measurement spot size: 2 µm
◆ Higher precision—10nm repeatability, 20nm measurement accuracy
◆ Non-contact measurement—does not scratch the sample surface and eliminates probe wear.
Main applications include: ink thickness measurement, MLCC thickness measurement, thick-film circuit measurement, silver paste thickness measurement, laser etching measurement, adhesive coating thickness measurement, surface roughness measurement of semiconductors and special materials, and more.
Non-Contact 2D Step/Thickness (Roughness) Measurer
Main functions of the device
The device employs a piezoelectric scanning method to perform non-contact measurements of step height, thickness, roughness, and other parameters.
Scanning method:
1. The piezoelectric scanning stage drives the probe to scan, while the sample remains stationary.
2. The probe is fixed, and the piezoelectric scanning stage moves the sample for scanning.
Specification parameters:
| Sensor measures speed | 2–20 mm/s (adjustable) |
| Measurement point spacing | ≥5μm freely adjustable |
| Sensor Z-axis range | ±55 µm |
| Sensor resolution | 0.001um |
| Measure the light spot | φ2 µm |
| Measurement accuracy | 20 nm (measurement standard step) |
| Electric scanning stage travel distance | High-precision effective stroke: 20 mm (mechanical stroke: 30 mm) |
| Machine table size | Customized according to actual needs |
| Scanning repeatability | 0.01 μm |
| Piezoelectric scanner resolution | 0.05um |
Non-Contact 2D Step/Thickness (Roughness) Measurer
Configuration Plan
Non-Contact 2D Step/Thickness (Roughness) Measurer
Machine Selection
You can choose a gantry-type machine, or a vertical-arm type, or simply purchase the piezoelectric module separately and integrate it yourself.
Individual piezoelectric module
Gantry machine
Arm-standing machine
Non-Contact 2D Step/Thickness (Roughness) Measurer
Introduction to Measurement Software Features (Supports Chinese-English bilingualism)
Piezoelectric Scanning Stage Control and Data Acquisition Software
● Set the scan start position and other parameters, then click Start Measurement to acquire the contour.
● Data processing: If the acquired contour shows significant tilt, it can be leveled. Simple data processing can be applied to the acquired contour to obtain a more accurate contour curve. Upper and lower limits can be set for automatic qualification assessment.
Non-Contact 2D Step/Thickness (Roughness) Measurer
Introduction to Measurement Software Features
Piezoelectric Scanning Stage Control and Data Acquisition Software
● It can scan and measure step height, roughness, radius of curvature, and more.
● Measurement values for each scan can be manually recorded in a table or automatically logged into the table, and the table can be exported.
● Each scan’s raw contour data can be automatically saved and converted into a .csv file.
The above image shows a table exported from the recorded measurement results.
Non-Contact 2D Step/Thickness (Roughness) Measurer
Precision Measurement Verification Method
★ Step Standards — 1/5/10/30/50 µm standard steps
★ Flat Mirror — Flatness 0.03 µm Flat Mirror
★ Sanfeng Roughness Gauge Blocks
Level regulations
Flat crystal
Roughness gauge blocks
Step Standards—1/5/10/30/50 µm Standard Steps
Grade Standard – Calibration Report
Flat Mirror – Flatness 0.03 µm Flat Mirror
OP1 Sensor Measurement of Flatness—Verification Results
The following data represent scans performed five times at the same location, with a scan travel distance of 10 mm.
◆ CLS-3000 OP1 measurement value: 0.002 µm
◆ CLS-3000 OP1 measurement value: 0.008 µm
◆ CLS-3000 OP1 measurement value: 0.004 µm
◆ CLS-3000 OP1 measurement value: 0.002 µm
◆ CLS-3000 OP1 measurement value: 0.008 µm
Sanyou Roughness Gauge Blocks
OP1 Sensor Measures Roughness Standard Blocks – Verification Results
Sanfeng's roughness gauge blocks: RA 0.41 µm
Measurement result: 0.427 µm
Sanfeng's roughness gauge blocks: RA 2.93 µm
Measurement result: 2.897 µm
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