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Spectral Confocal Displacement Sensor
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Detailed
Superior measurement capabilities—capable of meeting more diverse measurement needs.
1. THINKFOCUS spectral confocal displacement sensor CDS-700 features a smaller spot size.
2. THINKFOCUS spectral confocal displacement sensor CDS-700—no averaging applied.
3. The THINKFOCUS spectral confocal displacement sensor CDS-700 can simultaneously adapt to various materials and provides stable measurements.
Specification/Probe
| Model With CDS-700 |
OP1 | OP2 | OP3 | OP4 | OP4L | OP5 | OP6 | OP8 | |||
| Installation distance (1) | mm | 8 | 13.2 | 16 | 25.5 | 37 | 36.5 | 215 | 39.5 | ||
| Measurement range (2) | micrometer | ±60 | ±200 | ±600 | ±1800 | ±2200 | ±5500 | ±5000 | ±4000 | ||
| Maximum tilt angle (3) | degree | ±40° | ±37.5° | ±29° | ±21° | ±25° | ±14° | ±8° | ±18.5° | ||
| Amplifier model | Fc | Fa | Fc | Fe | Fd | Fd | Fe | Fd | Fa | Fd | |
| Spot size (4) | micrometer | 2 | 5 | 9 | 20 | 12 | 20 | 35 | 24 | 26 | 25 |
| Displacement measurement | |||||||||||
| Resolution (5) | nm | 2(8) | 5(20) | 10(40) | 20(80) | 24 ( 94 ) | 150(600) | 200(1000) | 100(500) | ||
| Linearity (6) | ±0.02%F.S. | ±0.02%F.S. | ±0.02%F.S. | ±0.02%F.S. | ±0.02%F.S. | ±0.02%F.S. | ±0.03%F.S. | ±0.02%F.S. | |||
| Accuracy (7) | micrometer | ±0.01 | ±0.02 | ±0.05 | ±0.1 | ±0.2 | ±0.5 | ±0.6 | ±0.5 | ||
| Thickness measurement (8) | |||||||||||
| Minimum thickness measurement | micrometer | 5 | 12 | 22 | 66 | 66 | 73 | 192 | 192 | 200 | 158 |
| Maximum thickness measurement | micrometer | 100 | 511 | 1694 | 5500 | 5500 | 6110 | 17078 | 17078 | 16500 | 14000 |
| Length | mm | 208 | 171 | 179 | 128 | 143 | 151 | 128 | 143 | 178.5 | 141 |
| Weight | kilogram | 0.49 | 0.28 | 0.22 | 0.15 | 0.15 | 0.28 | 0.16 | 0.16 | 0.46 | 0.255 |
| Diameter (9) | mm | 27/40 | 27/36 | 27/32 | 27 | 27 | 27/45 | 27 | 27 | 27/65 | 27/35 |
| Model With CDS-700 |
Pro2 | Pro3 | Pro4 | Pro5 | Pro6 | MP3 | |
| Installation distance (1) | mm | 16.4 | 52.5 | 20 | 68.5 | 10.1 | 8.2 |
| Measurement range (2) | micrometer | ±1150 | ±550 | ±2000 | ±5000 | ±1050 | ±800 |
| Maximum tilt angle (3) | degree | ±38° | ±23° | ±45° | ±17° | ±60° | ±16° |
| Amplifier model | Fd | Fa | Fc | Fd | Fc | - | |
| Spot size (4) | micrometer | 22 | 8 | 15 | 36.5 | 16.5 | 13.5 |
| Displacement measurement | |||||||
| Resolution (5) | nm | 20(80) | 8(33) | 20(80) | 150(600) | 18(70) | 20(80) |
| Linearity (6) | ±0.02%F.S. | ±0.02%F.S. | ±0.02%F.S. | ±0.02%F.S. | ±0.02%F.S. | ±0.03%F.S. | |
| Accuracy (7) | micrometer | ±0.1 | ±0.6 | ±0.1 | ±0.4 | ±0.09 | ±0.1 |
| Thickness measurement (8) | |||||||
| Minimum thickness measurement | micrometer | 44 | 20 | 73 | 192 | 40 | - |
| Maximum thickness measurement | micrometer | 3388 | 1412 | 6110 | 13514 | 2900 | - |
| Length | mm | 158 | 234 | 261 | 217 | 217.08 | 59 |
| Weight | kilogram | 0.31 | 0.84 | 1.25 | 0.57 | 1.27 | 0.02 |
| Diameter (9) | mm | 27/45 | 27/65 | 27/93.4 | 27/60 | 27/86 | 10 |
Specifications/Controller
| Model | CDS-700 |
| Sampling frequency | 200Hz-10KHz adjustable |
| Light source | Broad-wavelength white light (excited by blue laser) |
| Measurement mode | Displacement / Displacement (transparent body) / Thickness (transparent body) / Multi-layer (transparent body) |
| Communication Control | Ethernet (1000 Mbit) |
| Synchronous I/O | 1-channel synchronous trigger input (voltage range: 3.3–24V); 1-channel synchronous trigger output |
| General I/O | The two-channel general-purpose input can monitor the switch signals from external devices; the three-channel general-purpose output can be used to control external devices such as alarm lights, solenoid valves, and more. |
| Encoder | Supports up to 3 incremental photoelectric encoders for counting (A/B-phase single-ended signals); encoder counts correspond one-to-one with sensor measurement values (height/thickness). Supports encoder-based equidistant triggering. |
| Fiber optic connector | FC/APC |
| Compatibility | Compatible with all probe models (calibration required) |
| Power Supply/Power Consumption | 24V DC 3A |
| Operating ambient temperature | 0℃-50℃ |
| Operating ambient humidity | No condensation below 85% |
| Weight | 2kg |
| Vibration resistance | 10 to 57 Hz, multi-amplitude, 0.3 mm, 2 hours each in the X, Y, and Z directions |
| Analog output | Customizable |
| (1) The values given in the table are typical values, with a deviation of ±3% for OP1, OP2, OP3, and OP4, and a deviation of ±6% for OP5. | ||||
| (2) The values given in the table are typical for measurements using a flat reference surface, with a sampling frequency ranging from 200 Hz to 4.5 kHz; when the sampling frequency is between 5 kHz and 10 kHz, the measurement range decreases by approximately 50%. | ||||
| (3) The maximum measurable tilt angle refers to the extreme angular value when measuring specularly reflecting surfaces. For diffusely reflecting surfaces, the maximum measurable tilt angle can reach 87°. | ||||
| (4) At the midpoint of the measurement range, the spot size is smaller closer to the near end of the range and larger closer to the far end. The difference from the center to the near and far ends is about 10%. | ||||
| (5) The resolution refers to the stationary measurement of the flatness plate. At the center of the measurement range, measurements are taken at a rate of 1000 Hz, with an internal sliding average set to 64 cycles. The values enclosed in parentheses represent measurement results obtained without any averaging. | ||||
| (6) Calibration was performed using an encoder with 1 nm resolution. Under displacement measurement mode, the maximum error over the entire measurement range is as follows: Measurement speed of 1 kHz, and tilt angle set to 0°. These data represent the results immediately after factory calibration. | ||||
| (7) Typical values when measuring standard step gauges (step gauges with an accuracy better than 10 nm, for which the China National Institute of Metrology has issued an accuracy report); | ||||
| (8) At a measurement speed of 1 kHz, the typical value measured when the refractive index correction factor is 1.52; | ||||
| (9) The gripping areas of OP1, OP2, OP3, OP4L, OP6, Pro2, Pro3, Pro4, Pro5, and Pro6 all have a diameter of 27 mm. The first half of OP1 has a diameter of 40 mm; OP2 has a diameter of 36 mm; OP3 has a diameter of 32 mm; OP4L has a diameter of 45 mm; OP6 has a diameter of 65 mm; OP8 has a diameter of 35 mm; Pro2 has a diameter of 45 mm; Pro3 has a diameter of 65 mm; Pro4 has a diameter of 86 mm; Pro5 has a diameter of 60 mm; and Pro6 has a diameter of 86 mm. | ||||
| Note: If the above parameters change, the actual factory values of the product shall prevail. |
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