Comparison of Laser Microscopy and Spectroscopic Confocal Measurement for Roughness Assessment
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  • Comparison of Laser Microscopy and Spectroscopic Confocal Measurement for Roughness Assessment

Comparison of Laser Microscopy and Spectroscopic Confocal Measurement for Roughness Assessment

The THINKFOCUS spectral confocal profiler and the laser confocal microscope can achieve identical measurement results when measuring features on the order of 100 nanometers or larger. However, the microscope suffers from the disadvantage of a small field of view. In contrast, the spectral confocal displacement sensor boasts a measurement range of up to 100 × 100 mm. Below is a comparison of measurement results obtained using a laser confocal microscope and a spectral confocal 3D profiler.

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The THINKFOCUS spectral confocal profiler and the laser confocal microscope can achieve the same measurement performance when measuring objects at scales above 100 nanometers. However, microscopes have the disadvantage of a small field of view. In contrast, the spectral confocal displacement sensor boasts a measurement range of up to 100 × 100 mm.

The following is a comparison of measurement results obtained using a laser confocal microscope and a spectral confocal 3D profilometer.

 

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