Microfabrication Surface Roughness Measurement
Category:
Description
Measurement requirements
Scan the 3D morphology of microfabricated components and extract the profile to measure the surface roughness of the bottom groove.
Overview of Key Features
1. Non-contact measurement, integrated design
2. 3D morphology scanning, multi-functional data processing
3. Precise measurement applicable to various materials
4. Simple to use and easy to assemble and disassemble.
5. Fast scanning speed and high positioning accuracy
6. Repeatability accuracy guaranteed from ±0.5 to ±1 μm
4. High stability and strong anti-interference capability



Measurement results
The surface roughness Ra of the groove is approximately 4 μm.
Address the issues currently existing in measurement devices.
1. There are certain requirements for the measurement materials.
2. Contact measurement causes damage to the measured material.
3. Small measurement range, uncertain positioning, and difficult determination.
4. Slow measurement speed, low accuracy, and large measurement errors.
5. Complex structure, high cost
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