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Flatness measuring Instrument

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Measurement Serise

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Service Hotline：021-37781691

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Product description

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The flatness measuring Instrument is a high-precision non-contact flatness measuring equipment. The use of confocal displacement measurement technology combined with high-precision motion machine can achieve high-speed and high-precision flatness detection requirements.

Easy to set up and easy to operate. ±1um measurement accuracy, ±0.5μm repeatability.

Model	SP-1100
Measure speed	≤12mm/s
Measurement point spacing	0.2-72μm free settings
Measurement accuracy	±1μm
Platform Size	200×200mm
X and Y travel	100×100mm
Resolution	0.5μm
Repeatability	<1.4μm
Maximum allowable weight	10Kg
Span (Z direction)	400μm/1400μm/4000μm
Accuracy (Z)	±0.1μm/0.5μm/1μm
Sampling Frequency	100Hz-10kHz
Adapter rated input	100-240VAC 0.8A 50-60Hz
Controller rated input	24VDC 1A 1.5A(max)
Sensor Input	24V DC 3A