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Flatness measuring machine

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Flatness measuring machine

Product serial number
Product description
Parameters

The flatness measuring machine is a high-precision non-contact flatness measuring equipment. The use of confocal displacement measurement technology combined with high-precision motion machine can achieve high-speed and high-precision flatness detection requirements.

 

Easy to set up and easy to operate. ±1um measurement accuracy, ±0.5μm repeatability.

 

Model SP-1100
Measure speed ≤12mm/s
Measurement point spacing 0.2-72μm free settings
Measurement accuracy ±1μm
Platform Size 200×200mm
X and Y travel 100×100mm
Resolution 0.5μm
Repeatability <1.4μm
Maximum allowable weight 10Kg
Span (Z direction) 400μm/1400μm/4000μm
Accuracy (Z) ±0.1μm/0.5μm/1μm
Sampling Frequency 100Hz-10kHz
Adapter rated input 100-240VAC 0.8A 50-60Hz
Controller rated input 24VDC 1A 1.5A(max)
Sensor Input 24V DC 3A

 

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