The flatness measuring Instrument is a high-precision non-contact flatness measuring equipment. The use of confocal displacement measurement technology combined with high-precision motion machine can achieve high-speed and high-precision flatness detection requirements.
Easy to set up and easy to operate. ±1um measurement accuracy, ±0.5μm repeatability.
|Measurement point spacing||0.2-72μm free settings|
|X and Y travel||100×100mm|
|Maximum allowable weight||10Kg|
|Span (Z direction)||400μm/1400μm/4000μm|
|Adapter rated input||100-240VAC 0.8A 50-60Hz|
|Controller rated input||24VDC 1A 1.5A(max)|
|Sensor Input||24V DC 3A|
Customer service contact information
Service hours:9:00 — 18:00
24 hours after sale