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Measurement principle of spectral confocal technology

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Spectral confocal displacement sensor

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Product description

Parameters

Measuring principle of spectral confocal technique

Measure distance using wavelength information

A beam of polychromatic light (white) with a broad spectrum is emitted from the light source, and spectral dispersion occurs through the dispersive lens to form monochromatic light of different wavelengths. The focus of each wavelength corresponds to a distance value. When the measurement light hits the surface of the object and is reflected back, only the monochromatic light that meets the confocal conditions can be sensed by the spectrometer through the small hole. The distance value is obtained by calculating the wavelength of the sensed focal point

Specs/Probes

CDS-500		OP1	OP2	OP3	OP4		OP4L	OP5		OP6	Pro4	Pro5
Installation distance	mm	8	11	15	24		29	37		204	24	67
Range	μm	±55	±190	±600	±1850		±2000	±5500		±5000	±2000	±5000
Maximum Inclination	deg	±45°	±28°	±29°	±21°		±19°	±14°		±7.5°	±45°	±16.5°
Amplifier Model		Fc	Fc	Fc	Fe	Fd	Fd	Fe	Fd	Fc	Fc	Fd
Spot Size	μm	2	10	11	20	12	22	40	24	36	15	45
Displacement measurement
Resolution	nm	2(8)	5(20)	10(40)	20(80)	20(80)	24(94)	150(600)	150(600)	500(1000)	20(80)	150(600)
Accuracy		±0.02%F.S. (F.S.=Span)
Thickness measurement
Minimum Thickness Measurement	μm	5	12	22	66	66	78	192	192	200	66	192
Maximum Thickness Measurement	μm	100	511	1694	5500	5500	5998	17078	17078	16500	5665	13514
Length	mm	208	176	176	130.5	145.5	145.5	130.5	145.5	180	261	241
Weight	kg	0.49	0.30	0.40	0.23	0.25	0.25	0.25	0.25	0.6	1.62	1.38
Diameter	mm	27/40	27	27/32	27	27	27	27	27	27/65	27/93.4	27/56

Specifications/Controllers

Model	CDS-500
Sampling Frequency	200 to 4500 points/sec user definable
Light source	Blue Laser
Measurement Mode	Displacement/Thickness
Communication Control	Ethernet
Encoder	Incremental (A/B items)
Synchronous I/O	1 Trigger input(TTL)5V
Fiber Connector	FC/APC
Compatibility	Compatible with all probe models
Power/Power	24V DC 3A
Operating Temperature	5℃-40℃
Storage temperature	-30℃-70℃
Relative Humidity	5%-80% non-condensing
Protection Level	IP 40