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Measurement principle of spectral confocal technology

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Measurement principle of spectral confocal technology

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Measuring principle of spectral confocal technique

Measure distance using wavelength information

 A beam of polychromatic light (white) with a broad spectrum is emitted from the light source, and spectral dispersion occurs through the dispersive lens to form monochromatic light of different wavelengths. The focus of each wavelength corresponds to a distance value. When the measurement light hits the surface of the object and is reflected back, only the monochromatic light that meets the confocal conditions can be sensed by the spectrometer through the small hole. The distance value is obtained by calculating the wavelength of the sensed focal point

 

Specs/Probes

CDS-500   OP1 OP2 OP3 OP4 OP4L OP5 OP6 Pro4 Pro5
Installation distance mm 8 11 15 24 29 37 204 24 67
Range μm ±55 ±190 ±600 ±1850 ±2000 ±5500 ±5000 ±2000 ±5000
Maximum Inclination deg ±45° ±28° ±29° ±21° ±19° ±14° ±7.5° ±45° ±16.5°
Amplifier Model   Fc Fc Fc Fe Fd Fd Fe Fd Fc Fc Fd
Spot Size μm 2 10 11 20 12 22 40 24 36 15 45
Displacement measurement  
Resolution nm 2(8) 5(20) 10(40) 20(80) 20(80) 24(94) 150(600) 150(600) 500(1000) 20(80) 150(600)
Accuracy   ±0.02%F.S. (F.S.=Span)
Thickness measurement  
Minimum Thickness Measurement μm 5 12 22 66 66 78 192 192 200 66 192
Maximum Thickness Measurement μm 100 511 1694 5500 5500 5998 17078 17078 16500 5665 13514
Length mm 208 176 176 130.5 145.5 145.5 130.5 145.5 180 261 241
Weight kg 0.49 0.30 0.40 0.23 0.25 0.25 0.25 0.25 0.6 1.62 1.38
Diameter mm 27/40 27 27/32 27 27 27 27 27 27/65 27/93.4 27/56

 

Specifications/Controllers

Model CDS-500
Sampling Frequency 200 to 4500 points/sec user definable
Light source Blue Laser
Measurement Mode Displacement/Thickness
Communication Control Ethernet
Encoder Incremental (A/B items)
Synchronous I/O 1 Trigger input(TTL)5V
Fiber Connector FC/APC
Compatibility Compatible with all probe models
Power/Power 24V DC 3A
Operating Temperature 5℃-40℃
Storage temperature -30℃-70℃
Relative Humidity 5%-80% non-condensing
Protection Level IP 40
We could not find any corresponding parameters, please add them to the properties table

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