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  • MEMS Profile Measurement

    Measurement requirements
    Scan 3D profile of MEMS chip surface, and extract the profile to measure the corrosion segment differences on the upper surface.

     

    Main characteristics

    1. Non-contact measurement, and integral design;.
    2. 3D profile scanning, and multifunction data processing;
    3. Applicable to the accurate measurement of various materials;
    4. Simple use and convenient assembling & disassembling;
    5. High scanning speed and high positioning accuracy;
    6. Repeated accuracy ±0.5~±1μm;
    7. High stability and strong anti-interference.

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    Measurement result
    The corrosion segment difference on the upper surface is about 300μm.

     

    Solve the problems existing in present measuring devices

    1. Certain requirement for measured materials;
    2. Contact measurement may cause certain damage to the measured materials;
    3. Small measurement scope, uncertain position and determination difficulty;
    4. Slow measurement speed, low accuracy and large measurement error;

    5. Complex structure and high cost.

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