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  • Flatness Measuring System

    As a high-accuracy non-contact flatness measuring system, the flatness measuring machine employs the confocal displacement measurement technology and the high-accuracy moving machine platform to realize high-speed and high-accuracy flatness detection.

     

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     With simple setting and convenient operation, the product has a measurement accuracy of ±1um and a repeated accuracy of ±0.5μm.

     

    Model

    SP- 1100

    Measuring Speed

    ≤12mm/s

    Measuring Points Spacing

    0.2-72μm free setting

    Measurement Accuracy

    ±1μm

    Platform size

    200×200mm

    X-Y travel distance

    100×100mm

    Resolution ratio

    0.5μm

    Repeated Accuracy (X)

    < 1.4μm

    Maximum allowable load

    10Kg

    Measuring Range (Z-axis)

    400μm/1400 μm/4000μm

    Accuracy (Z)

    ±0.1μm/0.5 μm/1μm

    Sampling Frequency

    100Hz- 10kHz

    Adapter rated input

    100-240V AC 0.8A 50-60Hz

    Controller rating input

    24V DC 1A 1.5A(max)

    Sensor Input

    24V DC 3A

     

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