Measurement requirements
Scanning the 3D topography of the surface of the MEMS chip, extracting the profile and measuring some step differences of the etching on the upper surface.

Key Features Overview
1. Non-contact measurement, integrated design

2. Three-dimensional topography scanning, multi-function data processing
3. Suitable for accurate measurement of various materials

4. Easy to use, easy to assemble and disassemble

5. Fast scanning speed and high positioning accuracy

6.±0.5 to ±1μm repeatability guarantee

7. High stability and strong anti-interference ability

Measurement results
The step height of the etching on the upper surface is about 300μm.

Solve the problems of the current measuring device

1. There are certain requirements for measuring materials
2. Contact measurement, damage to the measurement material
3. The measurement range is small, the position is uncertain, and the measurement is difficult
4. The measurement speed is slow, the precision is low, and the measurement error is large

5. Complex structure and high cost