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MEMS Topography Measurement

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MEMS Topography Measurement

Scan the three-dimensional topography of the surface of the MEMS chip, extract the profile and measure some level differences of the etching on the upper surface
Product serial number
Product description
Parameters

Measurement requirements
Scan the 3D topography of the surface of the MEMS chip, extract the profile and measure some step differences of the etching on the upper surface

 

Key Features Overview
1. Non-contact measurement, integrated design

2. Three-dimensional topography scanning, multi-function data processing
3. Suitable for accurate measurement of various materials

4. Easy to use, easy to assemble and disassemble

5. Fast scanning speed and high positioning accuracy

6.±0.5 to ±1μm repeatability guarantee

7. High stability and strong anti-interference ability

 

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Measurement results
The step height of the etching on the upper surface is about 300μm.

 

Solve the problems of the current measuring device

1. There are certain requirements for measuring materials
2. Contact measurement, damage to the measurement material
3. The measurement range is small, the position is uncertain, and the measurement is difficult
4. The measurement speed is slow, the precision is low, and the measurement error is large

 

5. Complex structure and high cost

We could not find any corresponding parameters, please add them to the properties table
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