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Micro Interferometric Thickness Gauge

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Micro Interferometric Thickness Gauge

Product serial number
Product description
Parameters

3be9018f-29ab-40ad-997e-613f503299e2

 

The interferometric thickness gauge of the visualization module is added, and the position of the light spot can be observed microscopically for measuring tiny devices.

Z-axis dynamic measurement range 5-10mm (no strict requirements for distance, fluctuations in this range can be measured)

Large working distance, large dynamic range, suitable for online measurement, not affected by jitter

Easy to operate, no complicated calibration required

Fast measurement, 100 times faster than traditional models

Ethernet communication, more stable and fast

Main application areas:

PCB board coating, semiconductor (silicon, monocrystalline silicon, polycrystalline silicon), semiconductor compound, micro-electromechanical (MEMS), oxide/nitride, photoresist, hard coating, polymer coating, polymer...

 

technical parameter

 

Range (measurable thickness range)

0.5-50μm
Working Distance 7-70mm (depending on the spot)
Z-axis dynamic measurement range 5-10mm (no strict requirements for distance, fluctuations in this range can be measured)
Angle properties ±5°
Spot size 1-0.1mm (customizable size)
Accuracy 10nm
Resolution 1μm
Measure speed 2000 times/sec
We could not find any corresponding parameters, please add them to the properties table

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