Three-dimensional profile measuring instrument includes a main body of a measurement device, a stage on which the object to be measured is placed, and the same The optical axis direction of the axis optical module is perpendicular to the object plane of the stage; it is especially suitable for the measurement of the object to be measured with surface features such as deep holes and deep grooves. The measurement accuracy is high and the effect is good. The technical means of profilometer.

The three-dimensional profile measuring instrument is especially suitable for the measurement of the measured objects with the surface characteristics of deep holes and deep grooves. Difficult problems, various three-dimensional measurement methods and technologies have appeared so far, many of which have industrial applicability, such as three-dimensional measuring instruments, three-dimensional measurement technology based on structured light has mature products.

Three-dimensional profile measuring instrument has attracted attention and development in many fields because of its high precision and fast speed. Moreover, the existing three-dimensional profile measuring instruments or sensors based on structured light are installed vertically on the platform by using an industrial camera, and the light source is installed at a certain angle with the vertical optical axis of the lens of the industrial camera. This method has obvious shortcomings. Since the light source and the stage intersect at an acute angle, the light source cannot illuminate a part of the surface of the object to be measured, and the surface profile information of this part cannot be obtained. Although this disadvantage can be partially supported by rotating the object to be measured, due to the complexity of the overall structure and the fact that the rotating stage replaces the plane moving stage, it cannot measure objects of larger size. More importantly, the existing three-dimensional profiler cannot measure common structural forms such as deep holes and deep grooves.

The three-dimensional profile measuring instrument includes a measuring device body, a stage provided on the measuring device body and placing the object to be measured, and a three-dimensional contour of the object to be measured can be obtained. The coaxial optical module is located directly above the stage, and the optical axis direction of the coaxial optical module is perpendicular to the stage plane of the stage; the coaxial optical module includes light sources arranged in sequence from top to bottom , lens, liquid crystal grating, etc.