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Typical application of spectral confocal sensor in geometric measurement

Typical application of spectral confocal sensor in geometric measurement

Typical application of spectral confocal sensor in geometric measurement

  • Categories:News
  • Time of issue:2022-06-14 14:08
  • Views:

(Summary description)With the rapid development of computer technology, confocal art has become a research hotspot and has achieved rapid development.

Typical application of spectral confocal sensor in geometric measurement

(Summary description)With the rapid development of computer technology, confocal art has become a research hotspot and has achieved rapid development.

  • Categories:News
  • Time of issue:2022-06-14 14:08
  • Views:
Information

With the rapid development of computer technology, confocal art has become a research hotspot and has achieved rapid development. The spectral confocal sensor technology has the unique advantages of high measurement accuracy, fast measurement speed and non-contact measurement, and is widely used in industrial measurement.

The spectral confocal sensor can break through the diffraction limit of ordinary optical microscopes, and its lateral resolution is 1.4 times that of optical microscopes. Confocal measurement technology is the unique advantage of easily realizing high-precision, high-resolution and three-dimensional digital imaging, and is widely used in biomedicine, material science, semiconductor manufacturing, surface engineering research, precision measurement and other fields.

It does not need spectral confocal axial scanning, and directly responds to the axial distance information on the wavelength, which greatly improves the measurement speed. The sensor based on spectral confocal technology is a new type of high-precision non-contact sensor that has appeared in recent years, and the accuracy can theoretically reach the nm level. Spectral confocal sensors have low requirements on the surface state to be measured, allow the measured surface to have a large inclination angle, fast measurement speed and high real-time performance, and quickly become a popular sensor for industrial measurement, widely used in precision positioning, film thickness measurement, microscopic Contour precision measurement and other fields.

Typical application of spectral confocal sensor in geometric measurement test

The working principle of spectral confocal technology: The spectral confocal sensor uses a wide-spectrum light source to illuminate the surface of the object to be measured, detects the spectrum reflected by the spectrum, and determines the wavelength of the perfectly focused surface of the object , so as to determine the axial distance information.

The broad spectrum (such as white light) emitted by the light source is close to a point light source when it passes through the pinhole. After the polychromatic light passes through a beam splitter (semi-transparent mirror), it is illuminated by a set of dispersive glasses. The dispersive lens group is the monochromatic light (1, 2, 3) of various wavelengths in the optical axis direction to decompose the complex light. When the object to be measured is placed in the measurement area near the image plane of the dispersive lens group, when all wavelengths When the light is reflected back to the lens group, it is reflected back to the pinhole through the reflective surface of the beam splitter and received by the spectrum placed behind the pinhole. The point light source, a point on the surface of the object, and the pinhole in front of the spectrometer are conjugated to each other, so only the monochromatic light that is completely focused on the surface of the object to be measured can pass through the pinhole, and the wavelength is determined by the spectrum analyzer. Each wavelength corresponds to a fixed distance value in advance, so the maximum wavelength of the spectral curve can be determined to estimate the corresponding precise distance value.

Assuming that a point on the surface of the measured object is located on the image point of monochromatic light (2), and the pinhole is located at the focal point of the dispersive lens group, then when this single When the colored light is reflected back to the pinhole, the smallest point will be formed, and through the pinhole, the light intensity detected by the spectrometer is the largest. The pinhole not only removes the low light with the cecum, but also shields the monochromatic light of different wavelengths on the main focal plane of the non-dispersive lens, enabling the spectral confocal detection system to have high contrast, sharpness and extremely high resolution. Provides reliable, accurate and sustainable dimensional measurement.

Compared with other traditional displacement sensors, the spectral confocal sensor has the characteristics of non-contact, small size, high precision and high measurement efficiency, and has been widely used in various fields. Applications.

 

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